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Precision high-power device characterization at the wafer level

The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Cascade Microtech offers on-wafer power device characterization systems to reduce time-to-market for new power devices and to keep up with production.

The Tesla semi-automatic power device characterization systems for 200 mm and 300 mm wafers provide a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC).

The APS200TESLA, a fully-automatic 200 mm on-wafer probe system, is the industry’s first dedicated test system for high-power device production test up to 10.5 kV/400 A. Its high-power chuck with Taiko wafer handling capability, an anti-arcing solution and an auto-discharging system ensure high throughput and measurement accuracy, while providing a regulatory-certified safe testing environment.


Full-auto/Production Test 200 mm wafer

The APS200TESLA, a fully-automatic on-wafer probe system, is the industry’s first dedicated production test system for high-power applications. It features a high-power chuck with thin Taiko wafer handling capability, an anti-arcing solution, and an auto-discharging system to ensure accurate and efficient measurement at high-voltage and high-current conditions, increasing production throughput. The compact APS200TESLA ensures accurate production test up to 10.5 kV/400 A while providing a regulatory-certified safe testing environment.

APS200TESLA Product Video
APS200TESLA Product Highlights
APS200TESLA Data Sheet
APS200TESLA Facility Planning Guide

APS200TESLA
APS200TESLA

American Technology Awards - 2014 - Winner

Semi-auto 150 / 200 / 300 mm wafer options

The Tesla semi-automatic power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing  a low-noise, fully guarded and shielded test environment, as well an infrared laser light curtain and safety interlock system.

TESLA Product Video
Tesla Product Highlights
Tesla System Brochure
Tesla 200 mm Data Sheet
Tesla 300 mm Data Sheet
Tesla 200 mm Facility Planning Guide
Tesla 300 mm Facility Planning Guide

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TESLA200
TESLA200

TESLA300
TESLA300

Manual 150 mm wafer

The EPS150TESLA is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for high-voltage probing of power MOSFET, IGBT, BJT and other power devices at breakdown voltages up to 3,000 V (triaxial) /10,000 V (coaxial), and high-current probing up to 100 A for lowest on-state resistance.

EPS150TESLA Flyer
EPS150TESLA Data Sheet
EPS150TESLA Facility Planning Guide

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EPS150TESLA - Hight Power Probe Station
EPS150TESLA Probe System