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Vacuum Probe Systems


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Cost-Saving, Wafer-Level Probing in a Vacuum Environment

Today, more and more MEMS devices require vacuums to operate, such as RF MEMS, resonators and microbolometers, or the devices must operate in near vacuums such as in space. Testing these devices has been done generally after they are packaged – a very expensive process that accounts for 60 to 80 percent of the total cost of the device.

Features and Benefits

  • Test your devices in a high vacuum (1 x 10-5 mbar)
  • Specially designed thermal chucks for testing from -60°C to 300°C
  • Easy and ergonomic wafer handling with special substrate carriers
  • Full range of accessories for a complete vacuum testing solution
  • Manual and semiautomatic versions available

Since the potential for cost saving is very significant, Cascade Microtech introduced a unique solution for testing devices on wafer up to 300 mm in a high vacuum. The vacuum probe system is unique in that offers the renowned accuracy and functionality of a probe system in a high vacuum. Simple laboratory (PLV), manual (PMV) and semiautomatic (PAV) versions are available.

Most importantly, the vacuum probe systems operate using standard probing procedures and the Velox™ probe station control software. This means that the interface used with the test instrumentation on standard probe systems is immediately available for use with these systems. The system is fully compatible with industry accepted test instrumentation, and uses industry standard probing procedures.