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CM300xi Probe System

Products

With the Contact Intelligence technology, the CM300xi senses, learns and reacts to multiple temperatures and small pad layouts, automatically adapting and adjusting to provide the most accurate probe-to-pad alignment for a broad array of wafers, materials and devices. Designed with scalability and flexibility, the CM300xi delivers measurement accuracy and reliability whether as a semi-automated or a fully-automated dual-prober system, for I-V/C-V, RTN and RF measurements over a broad thermal range.

Features and Benefits

  • The Contact Intelligence technology enables CM300xi to adapt to temperature variance and provide automated drift correction for unattended testing on small pads over time and temperature.
  • The High Thermal Stability (HTS) capabilities and VueTrack™ probe-to-pad alignment technology minimize the need of manual re-adjustment when probing small pads across multiple temperatures.
  • Velox™ probe station control software simplifies wafer loading operation, test automation and measurement system integration, while preventing damage of probe tips and probe cards throughout the entire measurement cycle.
CM300xi Probe System
CM300xi Probe System

Contact Sales

Contact us at 1-800-550-3279 (1-503-601-1000) or complete our sales inquiry form.

CM300xi Semi-Automated Probe System

With an advanced shielding solution, CM300xi-F semi-automated system provides a moisture-free, light-tight and EMI-shielded test environment, enabling accurate and easy over-temperature measurements and low-leakage/noise measurements. Depending on the electrical measurement and temperature requirements the CM300xi is also available as a shielded version (CM300xi-S) or an open system without Contact Intelligence technology (CM300-O).Its mechanical accuracy and stability achieve repeatable fine-pitch, small pad and microbump probing. The CM300xi-F and CM300xi-S can be ordered field-upgradeable to a fully-automated system by adding a material handling unit to allow test automation out-of-cassette.

CM300xi Product Highlight (Semi-automated)
CM300xi Data Sheet
CM300xi Facility Planning Guide
CM300 Facility Planning Guide (legacy)

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Contact Intelligence™ Technical Brief

CM300xi Semi-Automated Probe System
CM300xi Semi-Automated Probe System

CM300xi Fully-Automated Probe System

With a material handling unit, the CM300xi fully-automated system handles up to fifty 200/300 mm wafers, as well as single die, fractions and small wafers, while providing cassette hot-swap capability. The modular design of CM300xi enables an easy upgrade to a dual-prober system. Whether a single or dual fully-automated system, the CM300xi achieves highly-accurate measurement performance  over a broad thermal range with minimum settling times. VeloxPro™ test automation software is SEMI E95 compliant, and integrates wafer handling, temperature control, z-profiling and stepping in an easy-to-use interface.

CM300xi Product Highlight (Fully-automated)
CM300xi Data Sheet
CM300xi Facility Planning Guide
CM300 Facility Planning Guide (legacy)

Related Content

VeloxPro Product Highlight
Thermal Systems Facility Planning Guide (20°C/30°C – 300°C)
Thermal System Facility Planning Guide (-60°C – 300°C)

Contact Intelligence™ Technical Brief

CM300 Fully-Automated Probe System
CM300xi Fully-Automated Probe System