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High Performance Probe Systems


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Contact us at 1-800-550-3279 (1-503-601-1000) or complete our sales inquiry form. View more

Publication Library

Browse brochures, data sheets, application notes, white papers and related files. View more

Probe Systems Planning

Facility Planning Guides

Used Probe System Buy-back

Whether you need a cost-effective manual station for probing 150mm wafers or a semiautomatic thermal station to probe 200mm or 300mm wafers, Cascade Microtech offers a complete line of high-performance solutions for on-wafer probing, circuit boards and modules, vertical probe cards, MEMS, electro-optic devices and more. Probe stations are available with accessories such as thermal control systems, special cables, calibration software, and industry-leading probes that help you position, calibrate, and characterize your device under test. Cascade Microtech pioneered the first 1 femtoamp measurement, and offers systems that probe up to 220 GHz with extremely low leakage and low contact resistance.

150mm Probe Stations

EPS150FA Probe Station

The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. Pre-configured application-focused probing solutions are available with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The MPS150 is the industry’s probe platform of choice. [View more]

200mm Probe Stations

Whatever the application - device characterization, modeling, process development, design de-bug or IC failure analysis, Cascade Microtech's 200 mm wafer probing systems have the precision and versatility needed for the most advanced semiconductor processes and aggressively scaled devices. [View more]

300mm Probe Stations

CM300xi - Fully Automatic Probe System

Cascade Microtech 300 mm probing solutions set the standard for on-wafer test, delivering the precision and versatility needed to address a wide range of advanced, complex testing requirements. [View more]

Dedicated Measurement Systems

Tesla 300

Integrated systems from Cascade Microtech provide a complete solution for complex measurement problems that cannot be solved with just a collection of piece parts. Each part of the integrated solution is optimized and fine tuned to work together, enabling fast accurate on-wafer data collection for complex application and measurement needs. [View more]

SourceOne Certified Pre-owned Equipment

200mm Probe Station - Summit 12K

Cascade Microtech’s SourceOne program brings quality and industry-leading performance to the secondary equipment market. Whether you choose to purchase a reconditioned probe system or trade in your old equipment (or simply let us buy it back!) - Cascade Microtech will support you every step of the way, from order to installation. [View more]

Probe System Accessories


Precision measurement capability does not end with the probe and probe station. We offer a complete set of accessories to allow you to position, navigate, determine signal fidelity, and contact the wafer or device under test. [View more]