Until now, terahertz (THz) technologies were bulky and expensive systems used only for radio astronomy and lab applications. Today, the technical progress achieved in recent years makes it possible for THz technologies to be commercialized in markets for inspection, control and monitoring, non-destructive testing (NDT), and for industrial monitoring of processes such as pharmaceutical quality control (QC). In addition, because of their ability to penetrate through barrier materials such as clothes and packaging, non-contact and non-ionizing testing can be performed.

THz technologies are also expected to open new applications, especially in biomedical and telecommunications, which will become the drivers of THz market growth in five to ten years.

sub-THz to THz wafer-level testing challenges

While significant progress has been made in THz (300-3000 GHz) circuit fabrication, the measurement infrastructure for characterizing such components remains largely undeveloped. The challenges range from the technical; transition to optics, high transmission line losses and machining tolerances to the administrative, with no broadly accepted standards.

Continued growth in THz applications requires the availability of quality test and measurement equipment. Typically, individual devices must be diced and mounted to a fixture for measurement. Robust and calibrated onwafer measurements of planar millimeter and sub-millimeter wave devices would significantly reduce the effort required to characterize a wafer of devices while increasing the accuracy of the measurement by eliminating errors and effects associated with fixtures.

MeasureOne THz solution

Under the MeasureOne collaboration with DMPI, the partnership will provide millimeter and sub-millimeter wavelength on-wafer ground-signal-ground probes and associated components for electrical measurement of devices and materials with frequencies from 140 GHz to 1.1 THz. The probes offer low insertion loss, as well as excellent probe tip and sample visibility. For THz measurements at the probe tip, the importance of probe placement onto the calibration standards is critical. In order make a accurate and repeatable measurements above 500 GHz, probe placement errors need to be less than 1 µm, and this is challenging to achieve with a manual probe station and positioners. The Cascade Microtech Summit™ and Elite™ semiautomated probe stations can be configured with programmable positioners to allow rapid and repeatable sub-micron positioning accuracy to ensure the highest precision at the probe tip. The THz probe products will be validated on Cascade Microtech's EPS150MMW and EPS200MMW manual probe systems, as well as the Summit 200 mm and the Elite 300 mm semi-automated probe systems. MeasureOne solutions remove risk and deliver confidence backed by assurances including guaranteed configuration and installation. For ongoing support, you have a single point of contact at Cascade Microtech.


Terahertz Probing

MeasureOne Benefits

  • Guaranteed Configuration
  • Guaranteed Installation
  • Guaranteed Support
  • Optimized Performance
  • Integrated Measurement
  • Training

Solution Components

  • mmw and sub-mmW on-wafer Ground-Signal-Ground probes
  • Components for electrical measurement of devices and materials up to 140 GHz up to 1.1 THz
  • Validated on EPS150mmW manual probe station
  • Validated on Summit 200 mm probe station
  • Validate on Elite 300 mm probe station

Solution Partners


Cascade Microtech, Inc.