InfinityQuad Tech Brief: Addressing the Challenges of Small Pad Probing

Smaller pads not only utilize less device real estate space, they also allow sacrificial test structures to be placed in scribe lines, meaning process control monitoring and device characterization can be performed without using valuable space for sellable circuits. Probing pads with large dimensions is no relatively simple with conventional probe technologies. However, when trying to probe pad sizes of 50 um x 50 um or less side skate becomes one challenge, as it causes wider probe marks and can change the pitch as extra overtravel is used. Read how InfinityQuad solves this and other challenges of probing small pads.

Created: August 14, 2017 | Updated: February 7, 2022 | Type: pdf | Size: 2.48 MB

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