Power Device Characterization Systems
Precision high-power device characterization at the wafer level
The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Cascade Microtech offers on-wafer power device characterization systems to reduce time-to-market for new power devices and to keep up with production.
For cost-effective manual high-power device probing up to 150 mm wafers, the EPS150TESLA ensures accurate measurements up to 10,000 V and 80 A DC.
The Tesla semi-automatic power device characterization systems for 200 mm and 300 mm wafers provide a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC).
The APS200TESLA, a fully-automatic 200 mm on-wafer probe system, is the industry’s first dedicated test system for high-power device production test up to 10.5 kV/400 A. Its high-power chuck with Taiko wafer handling capability, an anti-arcing solution and an auto-discharging system ensure high throughput and measurement accuracy, while providing a regulatory-certified safe testing environment.
Full-auto/Production Test 200 mm wafer
Semi-auto 150 / 200 / 300 mm wafer options
Manual 150 mm wafer
Manual 200 mm wafer
Contact SalesContact us at 1-800-550-3279 (1-503-601-1000) or complete our sales inquiry form.