Backside Emission Probe Systems
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Unsurpassed Flexibility for Backside Emission Microscopy
The Backside Emission Probe Systems are versatile, high-performance probe systems that bring together the advantages of a probe system and a bottom-up observation system.
Features and Benefits
- Unique design compatible with bottom-up emission microscope systems from all major vendors
- Dedicated chucks for photo and thermal emissions handle 200 & 300mm wafers as well as wafer parts and single chips
- Worlds first backside emission probe station which can handle vertical probe cards with MicroAlign™ technology (PA300BEP only)
- Designed for maximum stability for long-term emission tests
Backside Emission Probe Systems are designed for probing different substrates by contacting the device under test (DUT) with needles from the contact side (top side) and inspecting or stimulating the backside (bottom side) with an emission detection unit. The probe system is compatible with bottom-up observation systems from all major vendors.