The Next Step in 300mm Probing
The Elite 300 sets the new standard in 300mm probing. In step with the ITRS roadmap at 45nm and below, the Elite 300 overcomes measurement challenges brought on by increased device complexity, smaller pad sizes, and lower voltages. The Elite 300 delivers unprecedented stepping accuracy and wafer planarity over the full temperature range. It also provides the world's lowest-noise "Quiet" environment, and ensures low-leakage, low-capacitance measurements.
| Problems Solved: Accurate Measurements in Complex Environments |
| Small-Pad Probing |
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| Thermal Measurements |
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| Low-Noise Measurements |
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| Multi-Site Testing |
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| Internal-Node Probing |
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| Which Station is Right for My Application? |
| Parametric |
Gm,Vth |
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| Ig, Id off |
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| Cox, C-V |
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| 1/f |
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| RF |
Gain, Power |
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| NF, NP |
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| mmW |
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| multi-port |
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| WLR |
EM |
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| TDDB |
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| NBTI |
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| HCI |
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| FA/DD |
Internal node |
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| EM |
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| Laser |
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| Sub-micron |
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| = Recommended |
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= Compatible |
