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150mm Probe Stations

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A modular 150 mm manual probe system designed for upgradability

The MPS150 is a very cost-effective and easy to use, yet highly-precise manual probe system for wafers and substrates up to 150 mm. It supports a wide variety of applications such as I-V/C-V, RF, mm-Wave and sub-THz measurements, device characterization, failure analysis (FA), submicron probing, MEMS, optoelectronic engineering tests and more. Its stable platen is designed to accommodate up to sixteen positioners, providing a function similar to a probe card for special wafer-level reliability (WLR) applications.

Features and Benefits

Flexibility – Multiple options available for easy reconfiguration and upgrades for a wide range of applications
Stability – Rigid microscope bridge and solid station frame with built-in vibration-isolation solution for superior vibration attenuation
Ease-of-use - Ergonomic and straightforward design for comfortable and easy and simple operation

Application-Focused Solutions

Cascade Microtech offers MPS150-based pre-configured packages, dedicated for specific applications. Cascade Microtech’s application-focused probing solutions come with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence.

MPS150 Probe System

I-V/C-V DC parametric and low-noise measurements

The EPS150COAX and EPS150TRIAX are dedicated probing solutions that come with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The EPS150COAX incorporates best known methods for DC parametric test at pA levels. The EPS150TRIAX a dedicated probing solution for low-noise I-V/C-V measurements at fA levels.

EPS150COAX Flyer

EPS150TRIAX Flyer

DC Paramtric Test Probe Station EPS150COAX

EPS150COAX Probe System

RF Precision RF measurement results and calibrations up to 67 GHz

The EPS150RF is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for RF probing up to 67 GHz, with the ability to probe pads as small as 25 μm x 35 μm and beyond.

EPS150RF Flyer

EPS150RF Probe System

MMW millimeter-Wave, sub-THz and load pull measurements above 67GHz and beyond.

The EPS150MMW is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for probing up to THz frequencies.

EPS150MMW Flyer

EPS150MMW Probe System

Faliure AnalysisInternal node probing down to submicron level

The EPS150FA is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for electrical failure verification, localization and debug with the ability to probe features smaller than 1 μm.

EPS150FA Flyer

EPS150FA Probe System

High-power device characterization Precision on-wafer high-voltage/current measurements

The EPS150TESLA is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for high-voltage probing of power MOSFET, IGBT, BJT and other power devices at breakdown voltages up to 3,000 V (triaxial) /10,000 V (coaxial), and high-current probing up to 100 A for lowest on-state resistance.

EPS150TESLA Flyer

EPS150TESLA Data Sheet

EPS150TESLA Facility Planning Guide

EPS150TESLA Probe System