R48/R61 Failure Analysis & General Purpose Systems

EPD - 200mm - R SeriesR48 and R61 series probers for internal node probing and other general usage

Flexible and affordable the REL-6100 and REL-4800 Series Parametric Probe Stations combine precision sub-micron probing capability needed for IC failure analysis and design de-bug. Sub-micron resolution, precise motion control, and 8-inch travel.

 

R48/R61 - Configuration Information
ModelStageTriaxial ChuckThermal Chuck
R4800Manual  
R4820Manual Layout - Blue Dot
R4830ManualLayout - Blue DotLayout - Blue Dot
R4840ManualLayout - Blue Dot 
R6100Semi-Auto  
R6120Semi-Auto Layout - Blue Dot
R6130Semi-AutoLayout - Blue DotLayout - Blue Dot
R6140Semi-AutoLayout - Blue Dot 

See Also:

Backside Emission Microscopy Kit for R48/R61

Backside Emission Microscopy Kit for R48/R61 The backside emission microscopy kit extends your stations’ failure analysis capabilities by allowing one station to be configured for both standard front-side probing as well as backside emission microscopy. Changing from standard front-side to backside probing is done quickly and easily, minimizing downtime and maximizing productivity. View more ...