DC/CV Parameter Extraction for Semiconductor Device Modeling
Scaling of advanced CMOS devices as low as 32 nanometers relies on precision low current and low capacitance measurement capability. To fully characterize device behavior, wafer temperature control from -55ºC to 300ºC is essential. Cascade Microtech's probe stations enable precision measurements below 1fA by reducing noise and leakage significantly. The AttoGuard further enhances measurement performance for both thermal and ambient characterization and can be configured as an extended shield ground for CV or triaxial guard for IV measurements. In addition, Cascade Microtech offers a full range of electrically optimized thermal systems along with it's on-wafer measurement systems.
| EMI perturbs the measurement data | MicroChamber shields the measurement area |
| Measurement of ultra-low capacitance | AttoGuard reduces residual capacitance |
| Wafer temperature control | Electrically optimized thermal systems |
| Measurement of ultra low leakage | Low-current accessories and wafer chuck |
